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  • MTS Series Spectral Confocal 3D Topography Measurement System

    MTS Series Spectral Confocal 3D Topography Measurement System

    The MTS Series utilizes advanced spectral confocal technology for non-contact 3D surface measurement, achieving exceptional Z-axis resolution up to 20nm. Featuring linear motor platforms with 0.1μm precision, automated scanning capabilities, and multi-material compatibility. Supports various applications including semiconductor bump inspection, groove measurement, and laser mark analysis. Integrated with proprietary software and AI algorithms for efficient data processing and real-time reporting. Ideal for precision manufacturing quality control in electronics, automotive, and semiconductor industries.

    MTS Series Spectral Confocal 3D Topography Measurement System High-Speed Automated Metrology Solution 3D topography measurement
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