MTS Series 3D Topography Measurement System

Revolutionary 3D Measurement Technology

The MTS Series represents a breakthrough in non-contact 3D surface metrology, utilizing advanced spectral confocal technology to overcome limitations of traditional measurement methods. Unlike conventional digital microscopes requiring depth stacking or laser confocal systems with slow scanning speeds, the MTS system provides complete 3D surface data in a single rapid measurement cycle.

Core Technology Advantages

The system's spectral confocal sensor operates on optical dispersion principles, establishing precise wavelength-to-distance correspondence for exceptional measurement accuracy. This technology enables:

• High-Speed Measurement: 6000Hz sampling rate with linear motor-driven XY platform, operating 4x faster than conventional screw-driven systems

  
  

• Superior Resolution: Z-axis resolution with ±80nm accuracy, capable of measuring features as small as 2μm

  
  

• Material Versatility: Supports transparent/opaque materials, reflective surfaces, and rough finishes without surface treatment

  
  

• Non-Contact Operation: Prevents sample damage while maintaining measurement integrity

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Advanced System Configuration

Optical System Excellence

The MTS incorporates sophisticated optical modules with multiple configuration options (MTS 01/02), offering measurement ranges from 0.2mm to 10.6mm. The system features high-density point collection (192-1200 points/line) and precise spot control (5-10μm interval), ensuring comprehensive surface coverage.

Precision Motion Platform

• 4-axis electric platform with 350×350mm travel range

  
  

• ±0. XY positioning accuracy and ±0.15μm repeatability

  
  

• 5mm Z-axis stroke with ±0.2μm positioning precision

  
  

• High-speed scanning at 80mm/s with exceptional stability

  
  

Intelligent Software Integration

The system incorporates professional analysis software with spectral confocal acquisition, navigation mapping, and comprehensive 2D/3D measurement capabilities. Optional Q-DTS data interconnection and Avocado AI platform enable advanced analysis and automated reporting in multiple formats (Word, Excel).

Industrial Applications

The MTS Series serves critical quality control functions across multiple industries:

• Semiconductor: Bump height measurement, wafer groove analysis, defect detection

  
  

• Electronics: PCB inspection, component coplanarity verification

  
  

• Automotive: Surface topography analysis, precision part measurement

  
  

• Medical Devices: Implant surface quality, micro-feature inspection

  
  

• Research & Development: Material characterization, surface studies

  
  

Competitive Advantages

alternative technologies, the MTS Series demonstrates significant improvements:

• vs. Digital Microscopes: Eliminates depth stacking requirements, provides true 3D data

  
  

• vs. Laser Confocal Systems: Faster measurement speeds, larger field of view

  
  

• vs. White Light Interferometry: Better performance on rough surfaces, lower maintenance

  
  

• vs. Traditional Methods: Higher accuracy, automated operation, better repeatability

  
  

The system's modular design allows customization for specific application needs, while maintaining the reliability required for industrial environments. With 20 years of industry experience and service to nearly 2,000 industrial clients, Lionhearted Technology ensures the MTS Series meets the most demanding measurement requirements.

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