integrated fib-sem workstation
  • DB550 Ga+ Focused Ion Beam Field Emission Scanning Electron Microscope

    DB550 Ga+ Focused Ion Beam Field Emission Scanning Electron Microscope

    The DB550 integrates a Ga+ Focused Ion Beam (FIB) column with a Field Emission SEM, featuring "Super Tunnel" electron optics (low aberration, magnetic-free lens), 3nm@30kV ion resolution, and 0.9nm@15kV SEM resolution. It includes a nanomanipulator (≤10nm precision), gas injection system (single GIS, ±0.1°C temp control), and 8-inch compatible loadlock. Ideal for nano-fabrication, semiconductor failure analysis, and materials characterization with automated workflows and expandable detectors (EDS/EBSD/STEM).

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